Surface Chemistry Tutorial Using the Plasma Module
Application ID: 9663
Surface chemistry is often an overlooked aspect of reacting flow modeling. This tutorial model shows how surface reactions and species can be added to study processes like chemical vapor deposition (CVD). The tutorial then models silicon growth on a wafer.
Initially, the example uses a global model to investigate a broad region of parameters with complex chemistry. Then, a space-dependent model is set up and run. Careful attention is paid to the overall mass balance in the system while the difference between the mass-averaged velocity and diffusion velocity is explored. The model demonstrates that the total mass and molar concentration in the system is conserved. Finally, the height of the deposited silicon is studied as a function of time.
This model example illustrates applications of this type that would nominally be built using the following products:Plasma Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.