H. T. D. Grigg, T. H. Hanley, B. J. Gallacher
Newcastle University, Newcastle, Tyne and Wear, UK
This work enunciates the principles of SAW design from a physical perspective, examining the standard engineering modelling assumptions in some detail. An integral form analytical expression based on 2D elastic isotropic theory is validated against a COMSOL Multiphysics® simulation, corresponding to the traditional COM approach. Next, a COMSOL model of the full 3D problem, including anisotropy, ...
A. Auge, A. Weddemann, F. Wittbracht, B. Vogel, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
The oxidation behavior of metallic nanoparticles is investigated in respect to material parameters like Mott potential, defects on the microstructure and oxide volume increase per ionic defect. An emphasis is laid on magnetic nanoparticles where the degree of oxidation can be measured via the reduction of the magnetic moment.
E. Gutierrez-Miravete, and J. Streeter
Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
Optiwind, Torrington, Connecticut, USA
The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...
Pryor Knowledge Systems, Inc.
COMSOL, Certified Partner
Efficient, effective, and functional operation of autonomous systems requires a comprehensive real-time understanding, by those systems, of the embedding environment. This paper presents a brief overview of the multiphysics considerations involved in the development of models for thermoresistive and magnetoresistive sensors systems.
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler fabrication ...
C. Tonry, M. K. Patel, C. Bailey, M. P.Y. Desmuliez, W. Yu
Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China
Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current methods as it is a single step process. Hollow microstructures have many uses in industry from microchannels and microcapsules in BioMEMS to fibre-optical waveguides. It makes use of the dielectric properties of polymers combined with a heavily ...
H. T. Mengistu, A. García-Cristóbal
Material Science Institute, University of Valencia, Valencia, Spain
The possibility to dispose of two-dimensional (2D) approaches to problems originally posed in a three-dimensional (3D) geometry is always desirable since it reduces significantly the computing resources needed for numerical studies. In this work we report on a new 2D approach called Generalized Plane Piezoelectric (GPP) problem  and apply it to the calculation of the strain and electric fields ...
S. Park, S. Chung, and J. Yeow
University of Waterloo, Systems Design Engineering, Waterloo, Ontario, Canada
A micromirror or a torsional actuator in general has been proven to be one of the most popular actuators fabricated by Micro-Electro-Mechanical System (MEMS) technology in many industrial and biomedical applications such as RF switches, a laser scanning display, an optical switch matrix, and biomedical image systems. In this paper, two stacked micromirrors are presented and analyzed to show ...