S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
D. R. M. Vieira , S. A. Cardoso , A. S. Santos ,
 Universidade Federal do Pará, Pará, Brasil
A biotransformação de substratos utilizando enzimas imobilizadas em nanopartículas presentes num meio fluido (substrato), contido num bioreator CSTR, foi investigada. O software COMSOL Multiphysics foi usado para simular o sistema através do uso das equações de difusão de espécies apropriadas para o consumo do substrato. Nessa investigação, a difusão na superfície da nanopartícula, onde ocorre a ...
ACOUSTICS@MBD CONSULTANTS, LLC, Westborough, MA, USA
There is a practical interest among composite materials manufacturers to high-speed accurate non-destructive evaluation (NDE) technology for voids inspection when these voids are natural components of such complex structures like resin insulated layer of double-sided copper-clad laminates. Model based design (MBD) of NDE system is one of principal solutions for voids inspection in such ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
N.N. Sharma, and A. Tekawade
Mechanical Engineering Group, Birla Institute of Technology & Science, Pilani, Rajasthan, India
A simple design for a microfluidic flow system for use in mixing or reacting assays with limited sample availability has been proposed and analyzed using COMSOL\'s multiphysics simulation package. The design is based on differential electroosmotic flow concept which has facilitated a number of interesting flow phenomena in micro-domains. For an average potential drop of about 86 kV/m in the ...
S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium
In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program architecture is explained and is used to simulate two applications. The first calculates the voltage induced by an ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications
K. Umapathi, K. Sukirtha, C. Sujitha, K. A. Noushad, Venkateswaran, R. Poornima, R. Yogeswari
United Institute of Technology, Coimbatore, Tamil Nadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent in Aircrafts to meet the miniaturization requirements in avionics industry. The design consists of dielectric material in between two micro electrodes. The micro diaphragm is placed on one of the electrode. As the aircraft changes altitude, the ...