In questa sezione troverete i lavori presentati alle Conferenze mondiali COMSOL. Le presentazioni descrivono ricerche e prodotti innovativi progettati con COMSOL Multiphysics da colleghi di tutto il mondo. I temi delle ricerche presentate abbracciano un'ampia gamma di settori produttivi e aree applicative, in ambito elettrico, meccanico, fluidodinamico e chimico. Lo strumento di Ricerca Rapida vi permetterà di trovare le presentazioni che si riferiscono all'area di vostro interesse.

Platform Isolation Using Out-of-Plane Complaint Mechanisms - new

A. Arevalo[1], E. Rawashdeh[1], I. G. Foulds[2]
[1]Computer, Electrical & Mathematical Sciences & Engineering Division (CEMSE), King Abdullah University of Science & Technology, Thuwal, Saudi Arabia
[2]School of Engineering, University of British Columbia - Okanagan, Vancouver, BC, Canada

This paper reports the structural solid mechanic simulation of a MEMS out-of-plane platform that provides thermal and electrical isolation for a device built on it. When assemble, the platform lifted for approximately 400 μm above the substrate level. A mechanical stress analysis is then presented in order to evaluate the feasibility of building it using commonly used materials in MEMS. Our ...

Simulation of Unidirectional Interdigital Transducers in SAW Devices using COMSOL Multiphysics

D. Pradeep, N. Krishnan, and H. Nemade
Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, India

Surface acoustic wave (SAW) devices based on Rayleigh wave, shear wave, love wave, acoustic plate mode (APM) wave and flexural plate wave have been explored for sensors, actuators and telecommunication applications. An interdigital transducer (IDT) is a metallic comb-like structure fabricated over piezoelectric substrate. SAWs are generated over the substrate by applying electrical signal to the ...

Modeling and Prediction of Line Pattern Collapse

D. Bassett[1], M. Carcasi[1], W. Printz[1]
[1]Tokyo Electron America, Austin, TX, USA

In semiconductor manufacturing, effective cleaning of structures with liquid is one of the most important and potentially difficult process steps. It is important because it remains the cheapest and most cost-effective method to remove particles and residues from the structures in order to prevent defects, but can also be difficult because as the structures dry, surface tension forces can cause ...

Magnetic Nanoparticles for Novel Granular Spintronic Devices

A. Regtmeier[1], A. Weddemann[2], I. Ennen[3], and A. Hütten[1]
[1]Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
[2]Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
[3]Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria

Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identi fied them as components for a new type of magnetoresistance sensor. We propose a model for the numeric evaluation of the sensor properties. Based on the solutions of the Landau-Lifshitz-Gilbert equation for a set of homogeneously magnetized spheres arranged in highly ...

Design and Characterization of a MEMS Varactor

V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology

The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...

Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy

L. S. Sundharam[1]
[1]Kumaraguru college of Technology, Coimbatore, Tamil nadu, India

The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...

Detection of Magnetic Particles by Magnetoresistive Sensors

A. Weddemann[1], A. Auge[1], F. Wittbracht[1], C. Albon[1], and A. Hütten[1]
[1]Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany

In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics®. We apply our model to magnetoresistive sensors consisting of several soft ferromagnetic layers and their response to magnetic particles. The magnetization dynamic of the particles needs to be described in a similar manner, though due to size ...

Analysis of Electroosmotic Flow of Power-law Fluids in a Microchannel(1D)

K. SriNithin[1]
[1]IIT Kharagpur, Kharagpur, West Bengal, India

Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...

The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new

H. B. Nemade[1]
[1]Indian Institute of Technology Guwahati, Guwahati, Assam, India

The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when a slider is placed on the Rayleigh waves generated on a stator, the slider moves in reverse direction of the wave due to friction between the stator and the slider. A LiNbO3 piezoelectric substrate is used as a stator where comb structured Al ...

Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...