Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...
R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
R. Krishnan, H.B. Nemade, and R. Paily
Indian Institute of Technology, Guwahati
In this paper, we discuss simulation of one-port Surface Acoustic Wave (SAW) resonators using COMSOL Multiphysics. Resonator action can be achieved in one of the two ways; a single Inter-digital Transducer (IDT) having several fingers over a piezoelectric substrate or a short IDT with reflecting gratings at the ends of the IDT. We have modeled a Rayleigh wave type SAW device choosing YZ ...
A. Ravi, R. Krishna, J. Christen
Arizona State University, Tempe, AZ, USA
Capacitive MEMS sensors offer high spatial resolution, sensitivity and good frequency response. In this paper, we present a circular membrane capacitive MEMS device that finds use both as capacitive micromachined ultrasonic transducer (CMUT) and pressure sensor. The MEMS device is first designed and simulated to work as a CMUT operating at about 5 MHz frequency. The device can also function as a ...
L. Nayana, P. Manohar, S. Babu
Department of Electrical Engineering, Visvesvaraya Technological University, Bangalore, Karnataka, India
In this paper some discrete parts of a valveless piezoelectric micropump for drug delivery system is designed and simulated. The core components of the micropump are actuator unit that converts the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect and Nozzle/diffuser elements that are used to direct the flow from inlet to outlet. Simulations are ...
Charles Stark Draper Laboratory
Micromechanical resonators are used in a wide variety of applications, including inertial sensing, chemical and biological sensing, acoustic sensing, and microwave transceivers. Despite the distinct design requirements for each of these applications, a ubiquitous resonator performance parameter emerges. This is the resonator’s Quality factor (Q), which describes the mechanical energy damping. ...
T.H. Tan, S.J.N. Mitchell, D.W. McNeill, H. Wadsworth, S. Strahan
Queen's University Belfast, Belfast, United Kingdom
Schrader Electronics Ltd, Antrim, United Kingdom
The piezoresistance effect is defined as change in resistance due to applied stress. Silicon has a relatively large piezoresistance effect which has been known since 1954. A four point bending setup is proposed and designed to analyze the piezoresistance effect in p-type silicon. This setup is used to apply uniform and uniaxial stress along the crystal direction. The main aim of this work is to ...
A. Arevalo, I. G. Foulds
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
The University of British Columbia, Vancouver, BC, Canada
A COMSOL Multiphysics® simulation was used to simulate the behavior of a micro-membrane (Acoustic Pixel) to be used as a potential acoustic transducer. The MEMS and Piezoelectric devices interfaces were used to simulate such transducer. A four-cantilever spring configuration is initially proposed. Each cantilever has a width of 30 µm and are connected to a central circular plate with a radius ...
S. A. Selvin, N. B. Moorthy, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
This paper chalks out the design and performance of a piezo resistive surface micro machined circular diaphragm based pressure sensor. A structural deformation in the piezo resistive nano structure placed above the diaphragm will result in varied current density, which is in direct accordance with the applied pressure. This effect relies on the principle of piezo resistivity and employing a nano ...