R.V. Iyer, Vinay K., A. R. Kamath, A. Goswami, A. Sharma, A. V. Joshi, A. Mishra, N. S. Pai, S. Chakraborty, Rakesh D.
PES Institute of Technology, Bangalore, Karnataka, India
This abstract addresses the effect of scaling in air gap MOSFETs and determination of functional relationship between scaling parameter and sensitivity, frequency response. The modelling of the MOSFET and its simulations has been carried out using COMSOL Multiphysics. An air Gap MOSFET in its simplest form can be imagined to be one obtained by replacing the dielectric in a MOSFET with air. The ...
B. S. Kavitha, S. B. Rudraswamy, C. R. Venugopal
SJCE, Mysore, Karnataka, India
This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface ...
Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications
K. Umapathi, K. Sukirtha, C. Sujitha, K. A. Noushad, Venkateswaran, R. Poornima, R. Yogeswari
United Institute of Technology, Coimbatore, Tamil Nadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent in Aircrafts to meet the miniaturization requirements in avionics industry. The design consists of dielectric material in between two micro electrodes. The micro diaphragm is placed on one of the electrode. As the aircraft changes altitude, the ...