La Galleria delle Applicazioni raccoglie un'ampia varietà di tutorial e di app dimostrative realizzati con COMSOL Multiphysics in diversi ambiti applicativi, inclusi quelli elettrico, meccanico, fluidico e chimico. E' possibile scaricare i file dei modelli e delle app demo pronti all'uso e le istruzioni step-by-step per costruirli, e utilizzarli come punto di partenza per le proprie simulazioni.
Lo strumento di Ricerca Rapida permette di trovare i modelli che si riferiscono alla propria area di interesse.
Si noti che molti degli esempi qui presentati sono accessibili anche tramite le Librerie delle Applicazioni incorporate nel software COMSOL Multiphysics® e disponibili dal menu File.
Surface chemistry is often an overlooked aspect of reacting flow modeling. This tutorial model shows how surface reactions and species can be added to study processes like chemical vapor deposition (CVD). The tutorial then models silicon growth on a wafer. Initially, the example uses a ... Per saperne di più
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. Per saperne di più
This model solves the Boltzmann equation in two-term approximation for a mixture of nitrogen and oxygen representing a background gas of dry air. Electron transport coefficients and source terms are computed by suitable integration of the electron energy distribution function over ... Per saperne di più
This tutorial drives a capacitively coupled plasma with an L-type matching network at high and low powers. At low power, where the harmonics in the current are low, prefect matching is obtained at the chosen power value. Sweeps over power, frequency, and pressure are performed and their ... Per saperne di più
In this example, a hydrogen plasma reactor at moderate pressure is studied using a global model. The heavy species heat equation is included. In the first part of the study, a Maxwellian electron energy distribution function is used. In the second part, the global model is solved self ... Per saperne di più
This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is ... Per saperne di più
This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV ... Per saperne di più
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. Per saperne di più
This model solves the Boltzmann equation in the two-term approximation for a background of molecular and atomic hydrogen. Electron mobility and source terms are computed by suitable integration of the electron energy distribution function over electron impact cross sections. Per saperne di più
This model shows how shape optimization can be used design the coils of an ICP reactor to obtain plasma uniformity. The reactor in study is a planar ICP with the coils distributed along the radial direction. The Optimization study step is used to find the best coil placement so that the ... Per saperne di più