Menu

Discussion Forum

New Discussion
Filtra

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

MEMS pressure sensor

Posted 4 ott 2009, 13:36 CEST 0 Replies

Amir Tabatabaei
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hi

I want to know why the 3-d MEMS capacitance pressure sensor in model library is like this.
I mean why there is a hole in the structure. In other hand it couses little changes in cpapacitance due to ambient pressure canges.

May be if we use simple capacitor we get better result with more changes in output.

The second question is that how that thin layer can displace due to pressure changes.

Please explain more about this structure.
0 Replies Last Post 4 ott 2009, 13:36 CEST
COMSOL Moderator

Hello Amir Tabatabaei

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content