Shape Optimization of a Microphone Diaphragm
Application ID: 143361
This model demonstrates how to tune the lowest natural frequency of the diaphragm of a MEMS microphone using Shape Optimization. The Stationary then Eigenfrequency study modifies the shape of the suspension springs that support the diaphragm. Although the model is in 3D, shape change is confined to the xy-plane in accordance to MEMS fabrication.
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however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
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