Design and Optimization of Semiconductor Fabrication Equipment Using COMSOL®
In this live webinar, Dr. Manoj Kumar Mahala, a mechanical engineering manager at Lam Research India, will delve into the company's pivotal role in the semiconductor fabrication industry. He will discuss the key requirements of semiconductor fabrication equipment (SFE), specifically focusing on plasma-enhanced chemical vapor deposition (PECVD) reactors.
Dr. Mahala's talk will highlight the essential role of COMSOL Multiphysics® in the design and optimization of semiconductor fabrication equipment at Lam Research. He will discuss how fluid dynamics and thermostructural simulations are used to establish design parameters, address design challenges, and improve process uniformity, performance, and reliability. Through practical examples, Dr. Mahala will demonstrate how well-constructed simulation models can guide engineering decisions, accelerate design iterations, and help solve complex mechanical design problems by correlating simulation results with experimental data.
Register for Design and Optimization of Semiconductor Fabrication Equipment Using COMSOL®
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Webinar Details
Location:
Online
April 16, 2026 | 3:00 p.m. IST (UTC+05:30)
Keynote Speakers
Dr. Manoj Kumar Mahala is a mechanical program lead engineer at Lam Research with more than 17 years of experience in R&D, new product development, Lean Six Sigma, and management. He received his BTech in mechanical engineering from the Indian Institute of Technology (Indian School of Mines), or ITT(ISM), in Dhanbad and his PhD from the Indian Institute of Science (IISc) in Bangalore, specializing in the numerical modeling of vehicle ride comfort and wheel bearings. He is a certified Lean Six Sigma Green Belt and a Design for Reliability Yellow Belt and has received multiple awards for his contributions to the field.
Dr. Mahala's expertise spans Semiconductor Fabrication Equipment (SFE), healthcare/medical devices, and automotive design. He has successfully led and delivered projects involving the design, development, and validation of intricate electromechanical and chemical systems, including plasma-enhanced chemical vapor deposition (PECVD) reactors, X-ray tubes, and electric vehicles, demonstrating a consistent ability to provide innovative solutions. He has developed advanced numerical, finite element analysis (FEA), and CFD models to address complex multiphysics problems, including fluid dynamics, thermal, structural, and plasma–chemical reactions.
