Modeling MEMS Devices with Multiphysics Simulation Software
The design of reliable and high-performance microelectromechanical systems (MEMS), such as actuators and sensors, requires a strong understanding of the piezoresistive, piezoelectric, electrostatic, and thermal effects that occur in the devices. Since the performance of MEMS devices is strongly affected by these physical effects, multiphysics simulation techniques are extremely useful for analyzing the devices. This archived webinar includes an introduction to MEMS technology and the physical interactions that occur, and a demonstration of modeling an electrostatically actuated cantilever in COMSOL Multiphysics.
The model presented in the demonstration can be downloaded from our Model Gallery. The evaluation techniques described here are applicable to a range of device applications.
Language Availability: English