Ultrasensitive Mass Sensing Through Coupled Microelectromechanical Resonator Arrays

A. R. Hambarde [1], R. M. Patrikar [1],
[1] Visvesvaraya National Institute of Technology, Nagpur, Maharashtra, India
Published in 2015

Microelectromechanical coupled resonating arrays are being used for detecting biological and chemical analytes through mass sensing. Such arrays of perfectly identical resonators can be considered as periodic, ordered, non-localized systems. The change in the eigen parameters of the system upon mass or stiffness perturbation is a measure of the amount of perturbation. An attempt has been made in this article to investigate the dependence of mass sensitivity on the number of resonators in the system and whether it depends on the resonator which is perturbed and the eigenfrequency which is observed. Its dependence on the coupling strength was also observed.