%---------------------------------
% Ar/Cl2 plasma chemistry
%---------------------------------

%---------------------------------
% Species 
%---------------------------------
SPECIES
PRESETSPECIESDATA
Cl2 = Cl2
Cl = Cl
Cl_1m = Cl
Cl_1p = Cl
Cl2_1p = Cl2
Ar = Ar
Ars = Ar
Ar_1p = Ar
END

%---------------------------------
% Reaction Group Import
%---------------------------------
REACTIONGROUPIMPORT
Ar_Cl2_plasma_chemistry_import_Ar.txt      !  Ar
Ar_Cl2_plasma_chemistry_import_Cl.txt      !  Cl
Ar_Cl2_plasma_chemistry_import_mixed.txt   !  Mixed
END

%---------------------------------
% Surface reactions
%---------------------------------
SURFACEREACTIONS
Ar+=>Ar	   !  1     0.07  5.8
Ars=>Ar	   !  1     0.07  5.8
Cl=>0.5Cl2 !  0.01  0.0   0.0
Cl-=>Cl    !  1     0.0   0.0
Cl2+=>Cl2  !  1     0.07  5.8
Cl+=>Cl    !  1     0.07  5.8
END