Psp 1500[W] "Power input" mueN 4E24[1/(m*V*s)] "Reduced electron mobility" T0 300[K] "Gas temperature" p0 0.02[torr] "Gas pressure" Wc 30[cm] "Chamber width" Hc 22[cm] "Chamber height" Ws 15[cm] "Substrate width" Hs 2[cm] "Substrate height" Wd 5[cm] "Dielectric block width" Hd Hs "Dielectric block height" Ww Wc "Dielectric window width" Hw 2[cm] "Dielectric window height" dplasma 10[cm] "Distance between substrate and window" Lcoil 0.7[cm] "Coil cross section length" rc 5[cm] "Coil radius" Zcoil dplasma+Hw+Hs "Coil height" nCoil 4 "Number of coils" coilSpace 5[cm] "Coil spacing"