%---------------------------------
% Ar/Cl2 plasma chemistry
%---------------------------------

%---------------------------------
% Species 
%---------------------------------
SPECIES
PRESETSPECIESDATA
Cl2 = Cl2
Cl = Cl
Cl_1m = Cl
Cl_1p = Cl
Cl2_1p = Cl2
Ar = Ar
Ars = Ar
Ar_1p = Ar
END

%---------------------------------
% Electron impact reactions
%---------------------------------
ELECTRONIMPACTREACTIONS
CROSSSECTIONDATA
Cl2_siglo_xsecs.txt
Ar_xsecs.txt
END

ELECTRONIMPACTREACTIONS
RATECONSTANT
e+Cl=>Cl++2e  !   Ionization    14.25  4e-14[m^3/s]*(TE/1[V])^(0.5)*exp(-12[V]/TE)*N_A_const
e+Cl-=>Cl+2e  !   Ionization    14.25  1e-14[m^3/s]*(TE/1[V])^(0.8)*exp(-5[V]/TE)*N_A_const
END

%---------------------------------
% Heavy species reactions
%---------------------------------
HEAVYSPECIESREACTIONS
RATECONSTANT
Ars+Ars=>Ar++Ar+e	!   5e-10[cm^3/s]*N_A_const
Cl++Cl-=>2Cl	    !   1e-14[m^3/s]*(TGAS/300[K])^0.5*N_A_const
Cl2++Cl-=>3Cl	    !   1e-14[m^3/s]*(TGAS/300[K])^0.5*N_A_const
Cl-+Ar+=>Cl+Ar	    !   1e-14[m^3/s]*(TGAS/300[K])^0.5*N_A_const
END

%---------------------------------
% Surface reactions
%---------------------------------
SURFACEREACTIONS
Ar+=>Ar	   !  1     0.07  5.8
Ars=>Ar	   !  1     0.07  5.8
Cl=>0.5Cl2 !  0.01  0.0   0.0
Cl-=>Cl    !  1     0.0   0.0
Cl2+=>Cl2  !  1     0.07  5.8
Cl+=>Cl    !  1     0.07  5.8
END