April 22, 2021 10:30 a.m.–4:15 p.m. EDT

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COMSOL Day: Microsystems

See what is possible with multiphysics simulation

Join fellow engineers and simulation specialists to learn about multiphysics simulations in applications that involve microsystem devices. Topics will cover modeling MEMS-based sensors and actuators, as well as optic, microacoustic, and piezoelectric devices.

We welcome both experienced COMSOL Multiphysics® users and those who are new to the COMSOL® software to attend COMSOL Day. The sessions will focus on modeling techniques in the respective application areas, and you will learn about the software features and best practices from applications engineers. Keynote speakers from industries based on or reliant on such devices will provide perspective on the importance of simulation to these applications.

View our schedule below and register for free today!


10:30 a.m.
11:00 a.m.
Welcoming Remarks
11:15 a.m.

Modeling real-world MEMS devices and processes is only possible if multiphysics interactions are included. At small length scales, the design of resonators, gyroscopes, accelerometers, microspeakers, microphones, and actuators must consider the effects of multiple physical phenomena in their operation. These include, for example, electromagnetic-structure, thermostructure, and fluid-structure interactions, as well as damping effects. Numerous simulation users from the MEMS industry therefore use multiphysics simulation as a key element in their product development process.

During this session, the latest trend in modeling the behavior of MEMS components and applications will be investigated: You will learn how simulation specialists make their complex and high-fidelity multiphysics models available for other departments and for their customers.

11:45 a.m.

Byoungyoul Park, National Research Council Canada

The design and analysis of a low-voltage large stroke (over 10 µm) MEMS Lorentz deformable mirror, which uses a rigid crossbar, serpentine spring, and thin membrane mirror, is presented. The rigid crossbar and flexible serpentine spring structure minimize the driving current and voltage by maximizing the generated Lorentz force. Designed actuators constitute hundreds or thousands of arrays, depending on the application, and are bonded to a thin-film mirror. The mirror surface can be transformed into various shapes by the Lorentz force generated on each actuator node, which can be used to compensate for distorted wavefronts caused by atmospheric turbulence in ground-based telescope applications. The proposed structure is modeled and studied using the COMSOL Multiphysics® software.

12:05 p.m.
12:15 p.m.
Parallel Sessions
Modeling Piezoelectric Devices

Modeling piezoelectric devices requires a multiphysics approach, where incorporating such models within the design process requires a better understanding of the interactions between structural materials, piezoelectric ceramics, and fluid damping. A more accurate solution for all involved physics reduces development time and prototyping costs. Join this session to gain insight into the most important simulation techniques when it comes to modeling piezoelectric devices.

Tech Café: CAD and Meshing

Meshing microscopic geometries for the purpose of simulation can be challenging for several reasons. For example, widely different mesh sizes may be advantageous or even required from modeling domain to modeling domain. Alternatively, large directional dependencies on mesh accuracy, due to dimensional requirements or anisotropic behavior of the material parameters, need to be accounted for. Join this Tech Café to discuss the challenges of meshing MEMS and other microsystem devices with colleagues, while receiving useful tips from COMSOL technical staff.

12:45 p.m.
1:00 p.m.
Parallel Sessions

Acoustic propagation in structures with submillimeter physical features is common in the components of consumer products like mobile devices, protective grills of loudspeakers, hearing aids, and perforates used in mufflers and sound insulation. To model this accurately, you need to include thermoviscous losses in your definition of the physics. In this session, you will be introduced to modeling techniques used to capture these effects and how to model nonlinear effects in microacoustics systems.

Tech Café: Material Properties & Orientation

MEMS devices are designed and built in many configurations for a wide range of applications.

One fundamental aspect in the design of such devices is the use and manipulation of different materials. While smart materials such as piezoelectric, piezoresistive, shape memory alloy, and other materials are commonly used, some MEMS devices also incorporate engineered materials such as metamaterials, which exhibit unique electromagnetic or acoustic behavior.

Learn more about the implementation of various special material properties and discuss best practices with interested colleagues in this tech café.

1:45 p.m.
2:15 p.m.

Carl Meinhart, Numerical Design

Nearly all microfluidic devices to date consist of some type of fully enclosed microfluidic channel. The concept of "free-surface" microfluidics has been pioneered at UCSB over the past several years, where at least one surface of the microchannel is exposed to the surrounding air. Surface tension is a dominating force at the micron scale, which can be used to effectively control fluid motion. There are a number of distinct advantages to the free-surface microfluidic architecture. For example, the free surface provides a highly effective mechanism for capturing certain low-density vapor molecules. This mechanism is a key component (in combination with surface-enhanced Raman spectroscopy, i.e., SERS) of a novel explosive vapor detection platform, which is capable of sub-part-per-billion sensitivity with high specificity.

2:35 p.m.
2:45 p.m.
Parallel Sessions
MEMS-Based Sensors, Actuators, and Filters

COMSOL Multiphysics® and the add-on MEMS Module contain all of the modeling components and features necessary for analyzing the combined mechanical and electrical behavior in devices on the microscale. This session will introduce the MEMS Module by summarizing its features and demonstrating examples that analyze MEMS-based sensors, actuators, and filters.

Tech Café: Damping Effects

Viscous and thermal damping effects play a significant role in electrical, mechanical, and acoustic behavior at the dimension level of microsystems. This is inherently the case for MEMS devices. In this Tech Café, we will discuss the various damping processes when modeling such systems with colleagues and COMSOL engineers.

3:15 p.m.
3:30 p.m.
Parallel Sessions
Accelerometers and Gyroscopes Modeling

MEMS devices for measuring acceleration or orientation in space usually rely on the interaction between electrical and mechanical phenomena. As a consequence, a multiphysics approach often proves necessary to accurately model them. This session will demonstrate how COMSOL Multiphysics® allows you to easily set up such electromechanical models using built-in features in the software.

Tech Café: Extracting S-Parameters

Scattering parameters, or S-parameters, are important targets for numerous simulation studies in electronic device development. In this Tech Café, we will discuss and demonstrate various methods of extracting S-parameters from microscale capacitive and inductive devices. In particular, an interdigitated capacitor example will be available to be modeled in 3D to start the discussion. This can be modeled using three different approaches and then simplified to 2D. These techniques can also be applied to other devices, such as SAW sensors, RF MEMS switches, resonators, and filters.

4:15 p.m.
Concluding Remarks

COMSOL Speakers

Viswajith Hanasoge
Sales Engineer
Viswajith Hanasoge joined COMSOL in 2015 and currently works as a technical sales engineer. He received a master's degree in mechanical engineering from Arizona State University and his interests include solar energy, fluids, and thermal engineering.
Johan Sundqvist
VP of Sales - NW USA
Johan Sundqvist is COMSOL's vice president of sales for the northwestern region of the United States. He joined COMSOL in 2000 and received his MSc in chemical engineering from Luleå University of Technology, Sweden.
Jinlan Huang
Lead Applications Engineer
Jinlan Huang is an applications engineer for vibrations and acoustics and instructs acoustics training courses. She received her PhD from Boston University, Department of Aerospace and Mechanical Engineering, investigating acoustic wave propagation in complex-tissue environments and ultrasound-induced tissue heating and bleeding control. She joined COMSOL in 2011.
Maria Iuga-Römer
Applications Manager
Maria Iuga-Römer is an applications manager at Comsol Multiphysics GmbH. Previously, she studied physics at the West University of Timișoara and received a PhD at the University of Würzburg. She worked at the Fraunhofer Institute for Silicate Research, simulating microstructural properties to develop and optimize ceramic materials.
Andy Cai
Senior Applications Engineer
Andy Cai joined COMSOL in 2015. Previously, he received his PhD in geophysics from Yale in 2014 and spent a year at the University of Maryland, College Park for postdoctoral work.
Walter Frei
Principal Applications Engineer
Walter Frei has been with COMSOL since 2008. He received his PhD in mechanical engineering from the University of Illinois at Urbana-Champaign, working on the optimization of photonic crystal microcavity lasers.
Yeswanth Rao
Senior Applications Engineer
Yeswanth Rao is a senior applications engineer and has been with COMSOL since early 2008. He holds a PhD in biological engineering and a master's degree in electrical engineering. His finite element background is in MEMS, particularly piezoelectric modeling.
Lars Dammann
Applications Engineer
Lars Dammann has been an applications engineer at Comsol Multiphysics GmbH since 2016. He obtained his MSc in experimental solid-state physics at the University of Göttingen, where he studied the interaction of electrons and optical near fields using an ultrafast, low-energy electron diffraction experiment.
Lorant Olasz
Technology Director, External Interfaces
Lorant Olasz joined COMSOL in 2006 and is the technical product manager for the CAD Import and ECAD Import modules, LiveLink™ for CAD products, and LiveLink development team. Previously, he was a product specialist in structural mechanics. He received his PhD in solid mechanics from the Royal Institute of Technology, Stockholm.

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COMSOL Day Details


This event will take place online.

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April 22, 2021 | 10:30 a.m. EDT (UTC-04:00)
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Invited Speakers

Byoungyoul Park
National Research Council Canada

Dr. Byoungyoul Park is an associate research officer of the Nanotechnology Research Centre, National Research Council Canada. He has more than 15 years of research experience in electronics and advanced materials, including MEMS, LED, and polymer nanocomposites in industry and government research. He has worked in the field of electromagnetic MEMS sensors and actuators since 2012. The first 5 × 5 Lorentz actuator array with a polymer-based mirror has been designed, fabricated, and demonstrated since that time. He received a PhD degree in electrical and computer engineering, is the author or coauthor of 50+ publications in journals and conferences, and holds 9 issued patents.

Carl Meinhart
University of California – Santa Barbara (UCSB)/ Numerical Design, Inc.

Dr. Carl Meinhart is a professor of mechanical engineering at the University of California – Santa Barbara. He obtained his PhD from the University of Illinois in 1994. Since coming to UCSB in 1996, his research has focused on developing microfluidic devices and investigating their fundamental transport mechanisms. He has 150+ publications and conference papers, which have been cited more than 13,000 times. He holds 15 issued patents and is the founder/cofounder of three startup technology companies. In addition to being a professor at UCSB, Dr. Meinhart is the founder & CEO of Numerical Design, Inc., which is a COMSOL Certified Consultant. Dr. Meinhart is a fellow of the American Physical Society.