March 25, 2021 9:45 a.m.–4:15 p.m. CET

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COMSOL Day: MEMS

See what is possible with multiphysics simulation

Join fellow engineers and simulation specialists to learn about multiphysics simulations in applications that involve microsystem devices. Topics will cover modeling MEMS-based sensors and actuators, as well as optic, microacoustic, and piezoelectric devices.

We welcome both experienced COMSOL Multiphysics® users and those who are new to the COMSOL® software to attend COMSOL Day. The sessions will focus on modeling techniques in the respective application areas, and you will learn about the software features and best practices from applications engineers. Keynote speakers from industries based on or reliant on such devices will provide perspective on the importance of simulation to these applications.

View our schedule below and register for free today!

Schedule

09:45
Registration
10:00
Welcoming Remarks
10:15

Modeling real-world MEMS devices and processes is only possible if multiphysics interactions are included. At small length scales, the design of resonators, gyroscopes, accelerometers, microspeakers, microphones, and actuators must consider the effects of multiple physical phenomena in their operation. These include, for example, electromagnetic-structure, thermostructure, and fluid-structure interactions, as well as damping effects. Numerous simulation users from the MEMS industry therefore use multiphysics simulation as a key element in their product development process.

During this session, the latest trend in modeling the behavior of MEMS components and applications will be investigated: You will learn how simulation specialists make their complex and high-fidelity multiphysics models available for other departments and for their customers.

11:00

Surface Chemical Reactions Simulated in Microfluidic Systems for the Photodegradation of Micropollutants in Wastewater

Advanced oxidation processes (AOPs) for wastewater treatment are efficient methods for the removal of emerging pollutants, such as dissolved chemicals and drugs. Among AOPs, heterogeneous photocatalysis arises as a promising technology, with TiO2 as the most widely studied and efficient photocatalyst. One of the challenges lies in the treatment of large volumes, where light is rapidly blocked, thus hindering TiO2’s function. With microfluidics, the liquid is encased in microchannels, removing this volume issue. Microfluidics is an emerging branch of science that generated significant attention for its potential application to a wide range of fields over the last few decades. Microfluidic devices possess great characteristics, such as laminar flow regime, large surface area to volume ratio, and less mass transfer limitation due to the small volume and fine flow control. Nevertheless, inside these small-sized microchannels, where the fluids circulate, the space time or residence time is also small and the fluids’ velocity is high for foreseeing slow reactions to happen herein. In our position, we combine the photocatalysis and microfluidics, and prototype a smart microfluidic energy architecture. The simulation work done by deploying COMSOL Multiphysics® has demonstrated a very satisfying treatment efficiency so far.

11:30
Parallel Sessions
Modeling Piezoelectric Devices

Modeling piezoelectric devices requires a multiphysics approach, where incorporating such models within the design process requires a better understanding of the interactions between structural materials, piezoelectric ceramics, and fluid damping. A more accurate solution for all involved physics reduces development time and prototyping costs. Join this session to gain insight into the most important simulation techniques when it comes to modeling piezoelectric devices.

Tech Café: Meshing Microstructures

Meshing microscopic geometries for the purpose of simulation can be challenging for several reasons. For example, widely different mesh sizes may be advantageous or even required from modeling domain to modeling domain. Alternatively, large directional dependencies on mesh accuracy, due to dimensional requirements or anisotropic behavior of the material parameters, need to be accounted for. Join this Tech Café to discuss the challenges of meshing MEMS and other microsystem devices with colleagues, while receiving useful tips from COMSOL technical staff.

12:15
Break for Lunch
13:15
Parallel Sessions
Microacoustics

Acoustic propagation in structures with submillimeter physical features is common in the components of consumer products like mobile devices, protective grills of loudspeakers, hearing aids, and perforates used in mufflers and sound insulation. To model this accurately, you need to include thermoviscous losses in your definition of the physics. In this session, you will be introduced to modeling techniques used to capture these effects and how to model nonlinear effects in microacoustics systems.

Tech Café: Material Properties & Orientation

MEMS devices are designed and built in many configurations for a wide range of applications.

One fundamental aspect in the design of such devices is the use and manipulation of different materials. While smart materials such as piezoelectric, piezoresistive, shape memory alloy, and other materials are commonly used, some MEMS devices also incorporate engineered materials such as metamaterials, which exhibit unique electromagnetic or acoustic behavior.

Learn more about the implementation of various special material properties and discuss best practices with interested colleagues in this tech café.

14:00

Simulating MEMS Loudspeakers

The simulation of classic loudspeakers covers several physical domains, ranging from the electrical drive over the vibrating mechanics to the acoustic coupling. But what does it look like for MEMS loudspeakers? Their new drive mechanisms in combination with their comparatively small sizes lead to additional challenges. Here, we are going to take a closer look at the modeling of microacoustics, considering thermoviscous effects and meshing the geometry down to submicrometer sizes, in particular.

14:30
Parallel Sessions
MEMS-Based Sensors, Actuators, and Filters

COMSOL Multiphysics® and the add-on MEMS Module contain all of the modeling components and features necessary for analyzing the combined mechanical and electrical behavior in devices on the microscale. This session will introduce the MEMS Module by summarizing its features and demonstrating examples that analyze MEMS-based sensors, actuators, and filters.

Tech Café: Damping Effects

Viscous and thermal damping effects play a significant role in electrical, mechanical, and acoustic behavior at the dimension level of microsystems. This is inherently the case for MEMS devices. In this Tech Café, we will discuss the various damping processes when modeling such systems with colleagues and COMSOL engineers.

15:15
Parallel Sessions
Accelerometers, Gyroscopes, and Circuits

MEMS devices for measuring acceleration or orientation in space usually rely on the interaction between electrical and mechanical phenomena. As a consequence, a multiphysics approach often proves necessary to accurately model them. This session will demonstrate how COMSOL Multiphysics® allows you to easily set up such electromechanical models using built-in features in the software.

Tech Café: Extracting S-Parameters

Scattering parameters, or S-parameters, are important targets for numerous simulation studies in electronic device development. In this Tech Café, we will discuss and demonstrate various methods of extracting S-parameters from microscale capacitive and inductive devices. In particular, an interdigitated capacitor example will be available to be modeled in 3D to start the discussion. This can be modeled using three different approaches and then simplified to 2D. These techniques can also be applied to other devices, such as SAW sensors, RF MEMS switches, resonators, and filters.

16:00
Concluding Remarks

COMSOL Speakers

Mads J. Herring Jensen
Technology Manager, Acoustics
Mads Herring Jensen joined COMSOL in 2011 and is the technology manager for the acoustics products. Mads has a PhD in computational fluid dynamics from the Technical University of Denmark. Before joining COMSOL, he worked in the hearing aid industry for five years as an acoustic finite element expert.
Phillip Oberdorfer
Technical Marketing Manager
Phillip Oberdorfer is a technical marketing manager at Comsol Multiphysics GmbH. He helps produce webinar and technical content. Previously, he worked as an applications manager in technical support. Phillip received his PhD from the University of Göttingen, where he used COMSOL Multiphysics for a geothermal energy research project.
Thorsten Koch
Managing Director, Germany
Thorsten Koch is the managing director of Comsol Multiphysics GmbH. There, he worked as an applications engineer and was a member of the development team. He holds degrees in physics and applied mathematics, completing his PhD studies on 3D contractility measurements of living cells at the University of Erlangen-Nuremberg.
Lars Dammann
Applications Engineer
Lars Dammann has been an applications engineer at Comsol Multiphysics GmbH since 2016. He obtained his MSc in experimental solid-state physics at the University of Göttingen, where he studied the interaction of electrons and optical near fields using an ultrafast, low-energy electron diffraction experiment.
Maria Iuga-Römer
Applications Manager
Maria Iuga-Römer is an applications manager at Comsol Multiphysics GmbH. Previously, she studied physics at the West University of Timișoara and received a PhD at the University of Würzburg. She worked at the Fraunhofer Institute for Silicate Research, simulating microstructural properties to develop and optimize ceramic materials.
Walter Frei
Principal Applications Engineer
Walter Frei has been with COMSOL since 2008. He received his PhD in mechanical engineering from the University of Illinois at Urbana-Champaign, working on the optimization of photonic crystal microcavity lasers.
Jinlan Huang
Lead Applications Engineer
Jinlan Huang is an applications engineer for vibrations and acoustics and instructs acoustics training courses. She received her PhD from Boston University, Department of Aerospace and Mechanical Engineering, investigating acoustic wave propagation in complex-tissue environments and ultrasound-induced tissue heating and bleeding control. She joined COMSOL in 2011.
Colas Joannin
COMSOL
Colas Joannin joined COMSOL France in 2017 as an applications engineer. He is an engineer from École Centrale de Lyon and holds a PhD in nonlinear dynamics, accomplished with the Safran Group.
Chien Liu
Technology Manager
Chien Liu is a senior member of the technical team at COMSOL, working with the MEMS and Semiconductor modules. Previously, he worked in R&D at Polaroid and Zink Imaging, where he coinvented the Zero INK technology. Chien has a PhD from Harvard University in applied physics and a postdoctorate from Rowland Institute for Science.
Serjoscha Hylla
Applications Engineer
Serjoscha Hylla is an applications engineer specializing in geometry creation, CAD import, and meshing. Before joining Comsol Multiphysics GmbH in 2014, he studied mechanical engineering at the University of Kassel.
Melanie Pfaffe
Account Manager
Melanie Pfaffe is an account manager at Comsol Multiphysics GmbH. In 2011, she earned her PhD from the Humboldt University of Berlin, where she studied computer-aided theoretical chemistry.
Erik Bornhöft
Regional Sales Manager
Erik Bornhöft is regional sales manager and joined Comsol Multiphysics GmbH in 2010. He studied physics with a focus on fluid dynamics at the University of Göttingen. His thesis work at the DLR Göttingen involved experimental and numerical research into active control of supersonic flow.

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March 25, 2021 | 9:45 a.m. CET (UTC+01:00)
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Invited Speakers

Zhao Wei
Eden Tech

Dr. Zhao Wei is a chemical engineer at Eden Tech, a Parisian deeptech company developing microfluidic solutions and biomimetic technologies, with applications ranging from wastewater treatment to biotechnologies. Wei's expertise is to simulate chemical reactions for micropollutant degradation in wastewater by combining photocatalysis and microfluidics. Reaction kinetics are simulated in the microfluidic system by deploying COMSOL Multiphysics® in order to ensure the reaction yields for the prototype.

Tobias Fritsch
Fraunhofer IDMT

Tobias Fritsch studied media technology at TU Ilmenau. He finished with a master’s degree under Prof. Brandenburg in 2017. Since 2018, Mr. Fritsch has been working as a researcher at the Fraunhofer Institute for Digital Media Technology (IDMT). His research focuses on the combination of linear two-port theory and FEM in order to effectively simulate the interaction between acoustic actuators and control algorithms. He is responsible for acoustic measurements in the institute's anechoic chamber.