MEMS

Example Models

	Simulation of a Microrobot, 3D A microrobot's leg, which structurally moves due to the rapid application of heat, is modeled in this example. Heat is generated by an electric current and propagates by conduction through the leg and, due to thermal expansion and...
	Squeezed-Film Gas Damping in an Accelerometer Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding...
	Piezoacoustic Transducer A piezoelectric transducer can be used either to transform an electric current to an acoustic pressure field or, the opposite, to produce an electric current from an acoustic field. These devices are generally useful for applications that...