S. Nelson, and M. Guvench
University of Southern Maine, Gorham, Maine, USA
COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...
A. M. Morega1, J. C. Ordonez2, and M. Morega1
1Politehnica University of Bucharest, Bucharest, Romania
2Florida State University, Tallahassee, FL, USA
In this paper, we present a FEM model of a mixing MEMS μTAS device. A quasistatic magnetic field, produced by sequentially switched DC currents advected through conductors embedded in the device substrate beneath the flow channel, is used to mix the working magnetic fluid, while it is forced to flow through a rib walled channel. The body forces in the magnetized fluid perturb the otherwise ...
Perspectives of Thermo-electro-mechanical Micro Actuators for Micro Switch Applications: Design and Simulation
M. Matmat, M. Al Ahmad, and J. Y. Fourniols
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), Toulouse, France
In this work, thermo-mechanical simulations employing a 3D finite element analysis (FEA) of a current driven V-shaped actuator is presented. The structure's hot arms consist of polysilicon, which was used as the active material for deflection due to the Joule effect.COMSOL Multiphysics with stationary and parametric solvers was used to calculate the resulting deflection when current is applied. ...
D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As shown ...
K K BIRLA GOA CAMPUS
Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...
Bruce A. Finlayson
University of Washington
This talk demonstrates the success in teaching chemical engineering undergraduates to use COMSOL Multiphysics (FEMLAB) to solve realistic problems in a project format. Undergraduates have been creative and solved problems much more difficult than those in their textbooks, thus gaining a deeper understanding of transport processes. Illustrations are also given how they check to see they’ve ...
University of Cambridge
This work presents a different use of COMSOL as an integrated component of a computational tool framework used to automate designs creation. CNS-Burst is a computational synthesis method that has been implemented with the aim of automatically generating solutions to an assigned design task. COMSOL is integrated in the method and used to evaluate the performance of the design solutions found. ...
N. Qudus, T. Mahbub, S. A. Ali, and M. Shajahan
 Bangladesh University of Engineering and Technology, Dhaka Bangladesh
A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains continuity and Navier–Stokes equations for the solution of fluid flow. A particle trajectory model was ...
Palo Alto Research Center
In this presentation we present our analysis of the PARC Nanocalorimeter. Calorimetry is basically the measuring of heat of chemical reactions or physical changes. Nanocalorimetry is Calorimetry at the Nanometer scale. The PARC Nanocalorimeter is a special type of Calorimeter, it consists of arrays of Nanocalorimeters. The PARC Nanocalorimeter is intended to be used for screening biochemical ...
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...