Simulation of ZnO Enhanced SAW Gas Sensor

H. du Plessis[1], W. Perold[1]
[1]University of Stellenbosch, Stellenbosch, South Africa
Published in 2013

Surface acoustic wave (SAW) devices are widely used for their sensing capabilities and gas sensing is only one of many uses. There is an ever increasing need to make them as effective as possible by adding nanomaterials to the device. In this study a two-port delay-line structure with 128YX lithium niobate was simulated with COMSOL Multiphysics® in the form of a 2D cross-section. ZnO nanopillars were added to the sensing area of the device to increase sensitivity. Frequency and time dependant simulations were conducted on the device. It was found that even with the ZnO nanopillars the predetermined operating frequency for the SAW device is unchanged. The optimal height for the electrodes of the IDTs was determined to be 200nm.