Modeling of Different Shaped Micro-Cantilevers Used as Chemical SensorsG. Louarn, M. Collet, and S. Cuenot
Institut des Matériaux Jean Rouxel, Nantes
In this work, we present the modeling of V-shaped silicon micro-cantilevers.
The sensitivity of different V-shaped silicon cantilevers is estimated, as a function of the geometrical dimensions of the cantilever.
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