Light Scattering Simulation of Nano-objects on the Surface of Silicon Wafers by 3D Finite Element Method

Y. Oshikane, T. Higashi, N. Taniguchi, M. Nakano, and H. Inoue
Dept. of Prec. Sci. and Technology
Grad. School of Eng.
Osaka University
Japan
Published in 2011

Nanotechnology is rated as a key technology of the 21st century. In the field of nano-optics already at present, state-of-the-art scientific experiments and industrial applications exhibit nanometer to sub-nanometer design tolerances. This motivates the development and application of fast and accurate simulation tools for these fields or electromagnetic (EM) field.

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