Residual Stress in a Thin-Film Resonator

Model ID: 477


Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs relieves this effect.

The example is made up of four models: two thin film resonators with folded cantilever beam springs in 2D and 3D, and two thin film resonators with straight cantilever beam springs in 2D and 3D. The folded flexures relieve axial stress.

Questo modello è stato realizzato con:

MEMS Module